Fees and chemical information

Fees:

Georgetown users pay $25/h for all equipment, other than the SEM which is $50/h.

External users pay $80/h.

Fees include basic chemicals and glassware.

There is an at-cost surcharge for consumables such as deposition metals.

The basic chemicals that are included are:

• • Acetic acid,

  • MIBK,

  • nitric acid,

  • phosphoric acid,

  • Kemlab 1000 HARP eB 0.4 (PMMA)

  • Kemlab KL7015 photoresist and TMAH/TEAH developer (comparable to S1813)

Standard processes:

• • KL7015 PR, e-beam lithography: spinning, developing, lift-off

  • Transene etchants for Cu, Cr, Ti, Au, home-made for Al

  • Use of acetone, isopronanol and ethanol for rinsing and cleaning

  • Piranha, (B)HF and aqua regia, with special SOPs