Fees:
Georgetown users pay $25/h for all equipment, other than the SEM which is $50/h. External users pay $60/h. Fees include basic chemicals and glassware. There is an at-cost surcharge for consumables such as deposition metals.
The basic chemicals that are included are: - Acetic acid,
- acetone (regular and e-grade),
- CD-30 developer,
- IPA (regular and e-grade),
- hydrogen peroxide,
- Lor 5a,
- MF-19,
- MIBK,
- MMA,
- nitric acid,
- phosphoric acid,
- PMMA C-2,
- PMMA C-10,
- Shipley 1813 photoresist,
- sulfuric acid,
- SU-8 25, SU-8 100 and
- Transene Ti, Cr and Au etch.
Standard processes: - Shipley, SU-8, e-beam lithography: spinning, developing, lift-off
- Transene etchants for Cu, Cr, Ti, Au, home-made for Al
- Make PDMS
- Use of acetone, isopronanol and ethanol for rinsing and cleaning
- Piranha, (B)HF and aqua regia, with special SOPs
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